Process Recipes

Etch Recipes (PDF File)

Process Perameters for Shipley S1800 Photoresist (PDF File)

Process Perameters for Shipley 351 Developer (PDF File)

Materials Contained in Shipley S1800 Photoresist (PDF File)

UO Process Recipes 1999-2000

Working with HF

Instrumentation Instructions

Probe Station Use

Using the OAI Model 200 Tabletop Mask Aligner

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