To see how we use the instrumentation in the Semiconductor Lab, take the virtual tour.
Clean and Etch Lab
400 sq. ft. wet labs with 2 x 6' fume hoods. Outfitted with equipment for preparing and etching wafers.
Lithography Darkroom
Darkroom with fume hood and wet lab space for preparing and developing lithographically defined patterns on silicon and other substrates.
Headway Research Spin Coater
Two home-built contact mask aligners with UV exposure lamps
OAI Model 200 Contact Mask Aligner
Softbake hotplates, hardbake oven and ultrasonic bath
Diffusion/Oxidation
Chem Mat Spin Coater
2 dry oxide tube furnaces
2 wet oxide tube furnaces
2 boron diffusion tube furnaces
Thin Film Deposition
Key diffusion-pumped vacuum bell jar evaporator with Infinicon quartz crystal deposition monitor
Characterization and Testing
Inspection microscopes (one with computer-interfaced color CCD camera)
Four-point probe station, current source, and DVM for resistivity measurements
Allesi probe station/inspection microscope
Filmetrics – for film thickness measurements
4 Keithley Source-Measure Units – for current-voltage measurements
2 Agilent Precision LCR Meters – for capacitance-voltage measurements